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30 Aug 2007
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several matlab functions assist to drawing MEMS fabrication steps, including deposit, lithograph, etch (no lift-off), remove photo resistor.
make the annoying process step drawing easier.
Welcome any comments and suggestion.
Cite As
Gu Gu (2026). draw MEMS process steps (https://uk.mathworks.com/matlabcentral/fileexchange/16167-draw-mems-process-steps), MATLAB Central File Exchange. Retrieved .
MATLAB Release Compatibility
Created with
R14SP1
Compatible with any release
Platform Compatibility
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- MATLAB > Mathematics > Linear Algebra >
- Engineering > Mechanical Engineering > Micro-electromechanical Systems (MEMS) >
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Create scripts with code, output, and formatted text in a single executable document.
| Version | Published | Release Notes | |
|---|---|---|---|
| 1.0.0.0 |
