Model-Driven Production Software Development for Calibration at ASML

ASML develops lithography machines that operate with nanometer precision. To achieve high accuracy, a large number of calibrations and qualifications are needed. To achieve this, ASML deploys specific software applications on the machine to maintain performance during its entire lifetime.

A challenge is that functional engineers, who are responsible for requirements and design, work in a different domain language than software engineers, who are responsible for implementation. This can lead to misinterpretations and rework.

To deal with this challenge, ASML has successfully ramped up model-driven development of these applications by providing a common language for both groups of engineers, which enables them to work closely together during the whole development process. In this workflow, an executable MATLAB^® and Simulink^® model is developed and matured gradually. The annotated model acts as single source of truth for design, documentation, and implementation. The model is tested using a remote connection from Simulink to a real lithography machine, which results in early risk mitigation. Finally, C++ code is generated from the model, eliminating re-implementation.